Abstract: A 3D elasto plastic finite element model was established, and a detailed discussion was made on the influence caused by tunneling to ground settlement and superpile. The results showed that the ground settlement which occurs in larger scope would reduce with the increasing of shield tunnel excavation depth. If the pile existed just at the upside of shield tunnel crown, the minimum safe distance between pile toe and shield tunnel crown would be half tunnel diameter. The lateral up influenced zone due to tunneling was one tunnel diameter from tunnel centerline.